Substrate Flexibility

We have all the flexibility concerning substrate types and geometries.
A selection of more than 100 substrate holders allows us to mount and expose virtually every substrate
from tiny sample piece (typical in research applications) up to 6" wafers and mask blanks.

Substrate materials include:

- Si, GaAs, InP, SiC, GaN, Diamond
- Metals and Dielectrics
- Quartz / Fused Silica

By the way, we even demonstrated e-beam lithography and lift-off processing on fully functional CCD chips
mounted in their 20 pin DIP ceramic package.