Direct Write on Si, GaAs,
 InP, SiC, GaN, Diamond
 Pattern Design
 Ultrahigh Resolution
 Patterning & Nanotechnology
 Application Studies &
 Research
 Consulting & Evaluation




Application Studies & Research
Electron beam technology will continue to open new doors and opportunities in device physics and technology. We can assist our customers in accelerating this process by performing dedicated application studies and research projects.