High frequency electronics
High frequency electronics has been the major driver and first production relevant application for direct write e-beam lithography. Gatelengths in the 100 nm range can be produced with good process latitude and yield.

Relying on e-beam technology, GaAs and InP HEMTs deliver power gain cutoff frequencies well above 100 GHz. They are the crucial building blocks of advanced microwave monolithic integrated circuits (MMICs), being used in mobile telephone infrastructure and satellite communication systems.

xlith has exposed thousands of III/V- wafers (2-4 inch) with more than 100 different designs for advanced MMICs and discretes.

Industrial customers with internal e-beam capability rely on xlith as second source with excellent surge capacity.


Photonics and Optoelectronics
Photonics and Optoelectronics involve the manufacture of devices that convert electrons to photons and vice versa. Fast progress has been made over the last years especially in monolithic integration of active and passive photonic components. Key elements in photonic designs are closely coupled waveguides, wavelength filters, Bragg gratings, and diffractive patterns. Their spectral and spatial performance strongly depends on the precision, reproducibility, and accuracy of pattern definition.

Nano-Devices and Mesoscopic Systems
Fundamental physical properties dramatically change when the length scale of a system approaches the de Broglie wavelength. High resolution e-beam lithography is the method of choice for preparing devices on the mesoscopic scale.

We have the experience and the ultra-high resolution processes to support your research project in this fascinating field.


Quantum Computing
Nanotechnology offers much more than increasing the density of conventional logic designs. It enables a new kind of computation using algorithms based on quantum principles. For its successful application outside of research laboratories, quantum computing requires mesoscopic engineering to avoid decoherence and assure qubits interact only with themselves.

E-beam lithography will pave the way for the development of quantum computational systems.