Application Overview: products and services

High Frequency Electronics
High frequency electronics has been the major driver and first production relevant application for direct write e-beam lithography. Gatelenghts in the 100 nm range can be produced with good process latitude and yield.
Relying on e-beam technology, GaAs and InP HEMTs deliver power gain cutoff frequencies well above 100 GHz. They are the crucial building blocks of advanced microwave monolithic integrated circuits (MMICs), being used in mobile telephone infrastructure and satellite communication systems.
Xlith has exposed thousands of III/V-wafers (2-4 inch) with more than 100 different designs for advanced MMICs and discretes.
Industrial customers with internal e-beam capability rely on xlith as second source with excellent surge capacity.


Molds for Nano Imprint
In Nano Imprint Lithography (NIL), a template with nanometer features is pressed into a resist cast, creating a thickness modulation. Hot embossing and injection molding are two prominent variants of this technology. A third variant uses transparent templates and low viscosity, UV-curable monomeric resists.
Xlith fabricates templates for Nano Imprint Lithography based on Si and Quartz / Fused Silica substrates.


Soft Lithography Masters
Soft lithography methods utilize elastomeric stamps, replicated from a nanopatterned master substrate.
Xlith fabricates high resolution soft lithography masters based on SOI substrates.


Photonics and Optoelectronics
Photonics and optoelectronics involve the manufacture of devices that convert electrical signals into photons and vice versa.
Fast progress has been made over the last years especially in the monolithic integration of active and passive photonic components. Fully funtional large-scale photonic integrated circuits (PICs) have been demonstrated and are being used in high bandwidth DWDM fiberoptic communication systems.
Key elements in photonic designs are Bragg gratings and diffractive patterns. Their spectral and spatial performance strongly depends on the precision and accuracy of pattern definition.

Xlith serves customers in the photonics industry worldwide for applications and components like:

- fiber optic communication systems
- photonic integrated circuits produced in InP, silica-on-silicon, SOI
- Bragg gratings, wavelength selective filters, mode converters
- add/drop multiplexers, Mach-Zehnder interferometers
- DFB laser gratings with excellent spectral quality
- synchronized DFB laser grating sets with ultra-high
  spectral accuracy for DWDM applications
- photonic crystals and ring resonators
- photonic band gap designs and waveguides
- diffractive patterns and wavelength selective mirrors
- synthetic holograms

Using proprietary hardware modifications and software modules, we can cope with the most demanding customer specifications.