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Quantum II Versions
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Available Quantum II Versions
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(customized versions on
request)
| Scaling Factor |
Primary Background Feature Size |
Programmed Defect Range |
| 0.10 |
300nm |
10nm ... 120nm |
| 0.14 |
420nm |
10nm ... 170nm |
| 0.18 |
540nm |
20nm ... 220nm |
The Quantum II plate layout contains a set of 4 chips:
contact and wiring patterns in both their defective and intact
versions. This allows for sensitivity analysis of defect
inspection systems in die-die comparison mode.
| Chip |
Background Pattern |
Programmed Defects |
| DEFCARRAY |
contact holes |
yes |
| DEFWARRAY |
wiring |
yes |
| CBARRAY |
contact holes |
no, die-die reference pattern |
| WBARRAY |
wiring |
no, die-die reference pattern |
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Available Quantum II Specifications
|
6 inch Quartz 6025 / Antireflective Chrome
xlith technology level: XLM40 |
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