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Quantum II AFM Evaluation
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| Atomic Force Microscopy (AFM) is utilized to investigate
Chrome on Quartz pattern fidelity. The following examples
represent results obtained for the wiring background pattern
and design scaling factors of 0.14 and 0.10. All figures shown
are based on raw scan data as obtained from the Force
Microscope (Digital Instruments NanoScope). No attempts
have been made to compensate for the actual AFM tip
geometry. |
Example 1
| Defect Category: |
Bridge |
| Scaling Factor: |
0.14 |
| Instance: |
DEFWARRAY A 10 56 |
Programmed bridge defect in 420nm wiring background
pattern. Nominal bridge width: 140nm, measured width:
117nm. Noticeable pattern skew in second figure is due to
thermal drift of the AFM instrument.
Example 2
| Defect Category: |
Gap |
| Scaling Factor: |
0.14 |
| Instance: |
DEFWARRAY A 05 54 |
Programmed gap defect in 420nm wiring background pattern.
Nominal gap width: 70nm, measured width: 54nm.
Example 3
| Defect Category: |
Bridge |
| Scaling Factor: |
0.10 |
| Instance: |
DEFWARRAY A 10 56 |
Programmed bridge defect in 300nm wiring background
pattern. Nominal bridge width: 100nm, measured width:
109nm.
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Additional pattern independent AFM results
|
Corner acuity: estimated Chrome corner radius: < 25nm
Measured Chrome surface roughness: 0.82nm RMS
Measured Quartz surface roughness: 0.30nm RMS |
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