About xlith Founded 1997 by Dr. Bernd Maile, xlith is built on more than 15 years of experience in ultrahigh resolution electron beam lithography. We offer services and products related to pattern generation in the 10-250 nanometer regime. To achieve outstanding results we combine: State of the art electron beam equipment, additionally fine-tuned for optimum performance Thorough theoretical understanding In-house developed simulation and correction tools Proprietary process technologies xlith has served the most demanding customers in industry and academia. We know how to write nanometer. download our company brochure (PDF 533 kB)